HOOP LIFT 8" WIDE BODY CH 0040-20257
HOOP LIFT 8" WIDE BODY CH
PART NO : 0040-20257
|
ENDURA PVD STD LOADLOCK STAGE CASSETE 0020-20770
ENDURA PVD STD LOADLOCK STAGE CASSETE
PART NO : 0020-20770
|
GSKT RF 187 DIA LOW FORCE, 5FT LONG 739-041591-005
GSKT RF 187 DIA LOW FORCE, 5FT LONG
PART NO : 739-041591-005
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GSKT SHLD RF 3320-01170
GSKT SHLD RF
PART NO : 3320-01170
|
MxP CHAMBER 0040-09723
MxP CHAMBER
P/N : 0040-09723
|
VAT VALVE KIT PLATE FIXING S65048
VAT VALVE KIT PLATE FIXING (250)
MODEL : S65048
|
PEDESTAL
PART NO : 0020-31709
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FEED, CATHODE SUPPLY, DPS
PART NO : 0040-32200
|
AMAT ENDURA TXZ PROCESS KIT-2
AMAT ENDURA TXZ PROCESS KIT-2
|
AMAT ENDURA TXZ PROCESS KIT-1
AMAT ENDURA TXZ PROCESS KIT-1
|
BLADE 6" ADV101 SHUTTER 0020-28364
AMAT BLADE 6" ADV101 SHUTTER 0020-28364
|
RF SPIRAL GASKET(LAM,TEL,AMAT)
SPIRAL GASKET
(LAM 739-0451591-005), GASKET,RF 187DIA,LOW FORCE,5FT LONG
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MAGNET
MAGNET
PART NO : 0010-26451 / 0020-22153
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Centura Xfer Lid部分のClamp
Centura Xfer Lid部分のClamp
PART NO: 0020-36419
PART NO: 0020-36418
PART NO: 0020-36420
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AMAT ESC
AMAT ESC
PART NO : 0041-34688
|
AMAT MAGNET ASSY UNIT LIST
AMAT MAGNET ASSY UNIT LIST
|
SHIELD UPPER/LOWER SET
SHIELD UPPER/LOWER SET (SUS& AL)
UPPER PART NO : 0020-23070
LOWER PART NO : 0020-23069
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ENDURA PVD IMP CHAMBER MAGNET
ENDURA PVD IMP CHAMBER MAGNET
PART NO : 0010-21676
|
8’’A-MAG Magnet Assy A type
8’’A-MAG Magnet Assy A type
PART NO : 0010-26439 (0010-20225)
|
AMAT MxP Poly GDP 133 Holes
AMAT MxP Poly GDP 133 Holes
PART NO : 0021-41125
|