FRAME SOUCE 13 0020-20296, COVER INSULATOR 13 0020-20171

12.9 SOURCE ASSY (NONE HINGE) 0010-75221

CABLE ASSY, COAXIAL 13.56MHZ 0150-76315

C/A DC POWER SUPPLY 75FT 0150-20708

STEPPER CONTROLLER PCB AMAT ENDURA 0100-20173

HUB HEATER INSULATOR 0020-23349

HOOP LIFT 8" WIDE BODY CH 0040-20257

ENDURA PVD STD LOADLOCK STAGE CASSETE 0020-20770

6 LIFT PIN 0200-09035

GATE COMPLETED 76168-R1

AMAT ETCHER PARTS

AMAT CENTURA INDEXER MOTOR ASSY 0010-76317

SLIT VALVE 0030-70048

DENKA TFE 174 EMISSION TIP HITACHI CDSEM S-88XX,S-92XX,S-93XX,CG SERIES 567-3679

CRYO TEMP AI MUX BOARD 0100-20083

EDWARDS DRY PUMP QDP80 OVERHAUL KIT

GSKT RF 187 DIA LOW FORCE, 5FT LONG 739-041591-005

GSKT SHLD RF 3320-01170

EDWARDS DRY PUMP QDP40 OVERHAUL KIT

BROOKS ALIGHNER 001-4130-03

VACUUM GATE VALVE 3870-02561

MxP CHAMBER 0040-09723

3P 240VAC 50A LOAD SIDE ACPT R-LUG (BAB3050HT)

Kashiyama MU 100 Service kit

EBARA A70W OVERHAUL KIT/ DRY PUMP OVERHAUL KIT

MOTOR COMPL 650 ALL-IN-ONE

VAT VALVE KIT PLATE FIXING S65048

MOTOR COMPL (89497-R1)for 61144-PH52-AAM1 OH KIT

WATER MAINFOLD (SUPPLY RETURN FITTING 포함 ENDURA용)

HORIBA MFC

VAT VALVE TYPE 651 MOTOR

VAT VALVE TYPE 650 MOTOR

APPLIED ENDURA SHUTTER KIT

FDD TO USB CONTROLLER

NESLAB FLOW SWITCH

NESLAB PUMP

PEDESTAL

DPS INTER LOCK BOARD

LIFT PIN

FEED, CATHODE SUPPLY, DPS

AMAT ENDURA TXZ CABLE SET

TEL LINKAGE ARM BEARING SET

AMAT ENDURA TXZ PROCESS KIT-2

AMAT ENDURA TXZ PROCESS KIT-1

STP2203 BEARING SET

BEARING SHOP

PARTS FOR NESLAB CHILLER(FLOW METER 5-21 GPM 1"FPT& Valve Ball 1" NPT BRONZE)

AMAT HP /VHP ROBOT WRIST(0010-02170,0010-02171) ASSY LEFT & RIGHT HAND PIVOT & BEARING

AMAT TEFRON RING ( SPR PLATE, V-ELECTRO, BULLET NOSE, HR DT )

NSK BEARING(NRXT8013DDC8P5)

BLADE 6" ADV101 SHUTTER 0020-28364

AMAT DPS Metal 排気Heater

EP ROM V4.1 FOR NOVELLUS C2 IOC

RF SPIRAL GASKET(LAM,TEL,AMAT)

BEARING FOR MIRRA (AMAT)

EBARA DRY PUMP用 黄銅CAGE BEARING

EBARA DRY PUMP用Bearing

NESLAB CONTROL BOARD

ASSY, HOSE AMAT-1

Varian Lambda TCR Power Supply and Varian SECS Interface

MAGNET

LID SOURCE

LIFT HOOP 6“A101 WIDE BODY

POWER SUPLY

BEARING 15MM IDX32MM OD

BEARING FOR MIRRA

SCSI CF DISK

SANKEN POWER SUPPLY

HP PLUS ROBOT PARTS

MCVD RF Match Etch Back

Centura Xfer Lid部分のClamp

NSK BEARING

NSK BEARING

Sekidenko Controller

AMAT ION IMPLANTER, 6" PI9500

NESLAB HEAT EXCHANGER SYSTEM-3 SPARE PARTS - VALVE

NESLAB HEAT EXCHANGER SYSTEM-3 SPARE PARTS - FLOW METER

AMAT ESC

AMAT MAGNET ASSY UNIT LIST

OSAKA Bearing TG-1100F

DAI NIPPON SCREEN

SHIELD UPPER/LOWER SET

MULTI-RANGE DC SPUTTERING POWER SUPPLY

Centura DPS DCL3 MFC HEATER

ENDURA　PVD　IMP CHAMBER MAGNET

8’’A-MAG Magnet Assy A type

AMAT CENTURA CHAMBER SINGLE TYPE

APPLIED Producer L-Motion O-ring

BEARING 6911

BEARING 6912

BEARING 6006

BEARING FOR EBARA DRY PUMP

BEARING FOR EBARA DRY PUMP

BEARING FOR EBARA DRY PUMP

AMAT DPS GATE VALVE (new)

BEARING 6206ZZ

BEARING 6205ZZ

BEARING 6004ZZ

PROBE MOUNT SAPHIRE ASSY for AMAT

17ch TOUCH MONITOR for AMAT CENTURA, ENDURA, DPS

CTI ON BOARD 3PH MTR CONTROLLER

CHECK VALVE

ION GAUGE

CERAMIC BEARING FOR TMP OH

CERAMIC BEARING FOR TMP OH

CERAMIC BEARING FOR EBARA CMP PROCESS

AMAT MxP Poly GDP 133 Holes

BEARING FOR DRY PUMP O/H & TURBO PUMP O/H

BEARING FOR DRY PUMP O/H & TURBO PUMP O/H

BEARING FOR DRY PUMP O/H & TURBO PUMP O/H

BEARING FOR DRY PUMP O/H & TURBO PUMP O/H

BUSHING FOR VARIAN ION IMPLANTER

AMAT DPS FOR LINE HEATER

6" AMAT MAGNET FOR PVD(CENTURA, part no 0010-20224(old) 0010-20438(new))

APPLIED ENDURA SHUTTER KIT

QUARTZ HOLDER

QUARTZ Chamber

QUARTZ GAS PIPE

QUARTZ SUPORT BAR

BEARING FOR DRY PUMP O/H & TURBO PUMP O/H

BEARING FOR DRY PUMP O/H & TURBO PUMP O/H

BEARING FOR DRY PUMP P/H & TURBO PUMP O/H

BEARING FOR DRY PUMP P/H & TURBO PUMP O/H

AMAT DPS & OXIDE POLYIMIDE ESC (6" & 8")

BONDED SLIT VALVE

BONDED SLIT VALVE

CMP PARTS FOR BEARING ASSY(EBARA)

NOVELLUS PARTS / LAM PARTS / TEL PARTS

AMAT PARTS

AMAT CHAMBER

DPS CERAMIC WAFER LIFT PIN

WIDE BODY LOAD LOCK ASSY (0242-76372)

DPS METAL THROTTLE VALVE

CENTURA BIFFER LID MODIFICATION

ASSY UNIT(LIST)

AMAT MAGNET FOR PVD(ENDURA)

QUARTZ

CERAMIC PARTS

AMAT CENTURA & ENDURA LIGHT PEN

AMAT LID PLATE

AMAT POLYIMIDE ESC

AMAT CATHODE(0040-09005)

LAM AL ESC

AMAT DPS DTCU LIFTER

BROOKS PRESSURE CONTROLLER 5866RB1A1G4M2NA

SHIMADZU TMP POWER UNIT EI-303M

SLIT VALVE 0030-70048

AMAT INDEXER NARROW BODY (MOTOR부착) 0010-20286

AMAT INDEXER NARROW BODY REPAIR 0010-20286

AMAT ESC REPAIR 0041-37692

AMAT ESC REPAIR 0040-09961

VACUUM GATE VALVE 3870-02561

BROOKS ALIGHNER 001-4130-03

VAT ISOLATION VALVE 14040-PE34-ABI2/0016

MCA HEATER REPAIR

CMP DIGITAL CARD 990-004765-104

CTI CRYO PUMP OB8F

VARIAN ION IMPLANTER

MAGNET 0010-45647

SHIMADZU TURBO MOLECULAR PUMP TMP-2003LM

SHIMADZU TURBO MOLECULAR PUMP TMP-1103LMP

CRYO PUMP

DIGITAL I/O BOARD 19-00156-00

EUROTHERM CONTROLS

SHIMADZU TMP POWER UNIT PUMP CONTROLLER REPAIR

HITACHI COL-DCPS BOARD

MCA HEATER

MASS FLOW CONTROLLER REPAIR

SCREEN CAREER ELEVATOR

HOIST CHAMBER LIFT CONDOR

ASYST SMIF INDEXER

ORIENTAL MOTOR 2-PHASE DRIVER

ANALOG OUTPUT BOARD MP8316-V2

SERIPLEX I/O DISTRIBUTION BOARD

HIGH VOLTAGE MODULE

AUTO MATCHING CONTROLLER

AERA FC-R7700CD REPAIR

MCA HEATER REPAIR ( 0010-03254 )

AE PDX900-2V REPAIR

CKD VALVE CONTROLLER REPAIR VEC-C8-X0102

NOVELLUS HDP CERAMIC ESC REPAIR(02-267289-00, 02-264836-00 ,15-265814-00 REV.A)

CTI CRYO ON-BOARD 3PH MTR CONTROLLER REPAIR

HORIBA LIQUID FLOW CONTROLLER LV-F40M REPAIR

PFFEIFFER DCU400 TMP CONTROLLER REPAIR

TELEDYNE(IN USA) API MODEL452 OZONE MONITOR REPAIR

SERIAL SIDE BOARD(0100-00165) MIZAR MZ 8115 FAB 6800-03366-0003 REV J2(9409035) REPAIR

AERA POWER SUPPLY PS-76DA (M731468C) REPAIR

SMC THERMO CONTROLLER INR-244-404 (EY-0973)-01 REPAIR

IN USA MINI SCI & dFFOZ REPAIR

TEL MC-31050-M,-P,-S,-T BOARD SET REPAIR

EBARA TURBO MOLECULAR PUMP ET-1100W & CONTROLLER 1306W-TF & CABLE SET REPAIR

LEYBOLD TURBOVAC 361C

MCA ESC REFURBISHMENT(ENDURA)

HORIBA MFC SEC-E40 REPAIR

TEL TRACK HOT PLATE & COOL PLATE OH

INFICON IC5-7

SHIMADZU TMP CONTROLLER EI-303M ( for TMP303/403 )

INUSA(teledyne-api) gFFOZ 3030-06231 FULL FLOW OZONE SENSOR REPAIR

IN USA SENSOR CONTROL INTER FACE MODEL SCI-PLUS REPAIR(AMAT PART NO : 0190-35874)

AMAT SCANNER BOARD 0190-07908 REPAIR

AMAT INTERLOCK BOARD 0010-20458 REPAIR

GRANVILLE PHILLIPS 307 VACUUM GAUGE CONTROLLER REPAIR

BRONK HORST(EL-FLOW) SEZ-104

LINTEC MFC MC-2300

NOVELLUS SIO CONTROLLER 02-124967-00

CPI POWER SUPPLY CPW2870B10

SIMULATOR FOR TEL FURNACE A-8 BOARD REPAIR

VAT VALVE REPAIR

VAT VALVE SEREIS

AMAT RF APPLICATOR TUBE REPAIR

BOARD REPAIR( ION IMPLANTER )

TURBO DRIVE CONTROLLER

COMP P100 CHASE CONTROLLER

Sumitomo OZONE GENERATOR

TEL MAIN ARM UNIT CONN BOARD A

Brooks Automation ROBOT - VTR5

TURBOMOLECULAR PUMP

VAT ACTUATOR

OZONE MONITOR

ESC TEMP CONTROLLER REPAIR

VICOR POWER SUPPLY

MKS PRESSURE CONTROLLER

MKS THROAT VALVE

INTERLOCK BOARD

CND391 BOARD

MOTOLORA INTERFACE PCB BOARD

MOTOR IO BOARD

SBC SV21 BOARD

STEP CONT BOARD

TERMINAL BEAM D.I BOARD

VDSⅡ CONTROLLE BOARD

MFC

MFC

MFC

MFC

MFC

MFC

AMAT APC MATRIX BOARD

POWER SUPPLY

AC SERVO DRIVER

INJECTION SYSTEM (INJECTION VALVE)

INJECTION SYSTEM (INJECTION VALVE)

DRIVER

MFC REPAIR

MICROWAVE REPAIR

MKS REMOTE PLASMA SOURCE REPAIR

ROTARY JOINT

MFC

MFC

Throttle VALVE REPAIR

Throttle VALVE

TYLAN GENERAL, MILLIPORE, Celerity Throttle Valve REPAIR

CRYO CONTROLLER (NETWORK TERMINAL)

ASTEX OZONE GENERATOR

ESC REPAIR

ESC REPAIR

ESC REPAIR

ESC REPAIR

MKS BARATRON

ESC REPAIR

ESC REPAIR

ESC REPAIR

CENTURA ASSY HP ROBOT DRIVER (UPEER&LOWER)

ASSY, ES DTCU

BELLOWS VALVE

ASTEX 3.0KW Generator

NESLAB CHILLER HX-150

ASTEX INVERTER MODULE

SUMITOMO OZONE GENERATOR

DPS VAT GATE VALVE(3870-02560,3870-02561)

MKS OZONE GENERATOR LIST(AVAILABLE)

TURBO PUMP CONTROLLER

TURBO PUMP

V440 BOARD

NESLAB CHILLER

ROTARY JOINT ( U N I O N ) REPAIR FOR CMP

TURBO PUMP CONTROLLER

TURBO PUMP

YASKAWA Platen MOTOR

Repair for ION implanter Bushing

AMAT ROBOT

DTCU FAN

CMP Digital Card(Dual Cont Assy)

MFC

MFC

MFC

MFC

MFC REPAIR

MFC REPAIR

MFC REPAIR

MFC

MFC

MFC

MFC

Communication Board

A-MAGNET

Repair for ION implanter

Repair for ION implanter

ELS CATHODE POWER SUPPLY

ELS CATHODE POWER SUPPLY

SMART MATCHER

MATSUSADA POWER SUPPLY

ADAPTIVE PRESSURE CONTROLLER

ADAPTIVE PRESSURE CONTROLLER

ADAPTIVE PRESSURE CONTROLLER

ADAPTIVE PRESSURE CONTROLLER

VAT 65044-PH52 Valve Controller

VAT Controller for Series 650

S61.2 Butterfly Valve (61234-KEAQ)

S65.1 Pendulum valve Motor Driver

VEXTA MOTOR

ORIENTAL MOTOR

15V POWER SUPPLY

PVD HEATER DRIVER

LAMP DRIVER

ZYGO LASER

Original laser tube

KYOSAN POWER SUPPLY

90DEG POWER SUPPLY

AE RF GENERATOR PDX8000

MKS PRESSURE CONTROLLER

KYOSAN RF GENERATOR

PRODUCER HEATER

MCA HEATER

VAT GATE VALVE

CMP CARD PⅢ (CPU BOARD)

CMP Analog Card(Dual Cont Assy)

RF RING

THROATTLE VALVE

RF MATCH

AXCELIS HV-MODULE PS

OZON GENERATOR

MONOCHROMTER

NOVELLUS MC3 CONTROLLER

MINERTIA MOTOR

MOTION ENGINEERING BOARD

IO PC BOARD

INTEL CPU BOARD

ION IMPLANTER POWER SUPPLY & BOARD REPAIR

AC SERVO MOTOR

AC SERVO MOTOR

SV-P1203

I O INTERFACE

ANALOG/DIGITAL I/O INTERFACE

4-AXIS INTERFACE

VAT VALVE ACTUATOR REPAIR

INJECTION VALVE

SMC HIGH VACUUM VALVE

NOVELLUS CERAMIC DOME REPAIR

AMAT BOARD REPAIR

AMAT DTCU

MOTOR & MOTOR DRIVER

MOTOR & MOTOR DRIVER

MOTOR & MOTOR DRIVER

MOTOR & MOTOR DRIVER

MOTOR & MOTOR DRIVER

MOTOR & MOTOR DRIVER

MOTOR & MOTOR DRIVER

MOTOR & MOTOR DRIVER

MOTOR & MOTOR DRIVER

MOTOR & MOTOR DRIVER

MOTOR & MOTOR DRIVER

MOTOR & MOTOR DRIVER

DRY PUMP O/H

VARIAN VIISTA ESC 8

ESC TEMP CONTROLLER REPAIR ( PHOTON UNIT )

ROTARY JOINT ( U N I O N ) REPAIR FOR CMP

ROTARY JOINT ( U N I O N ) REPAIR FOR CMP

VALVE TEST TOOL

MKS OZONE GENERATOR

EDWARDS DRY IPX-100

MKS OZONE GENERATOR AX8200

NOVELLUS CONTROLLER REPAIR

AKT VAC3000(3500)

AMAT MAGNET FOR PVD(ENDURA)

TEL DRM ESC(POLYIMIDE TYPE)

AMAT MONOCHROMATOR

AMAT P-5000 MXP OXIDE ESC

AMAT CENTURA DPS ESC (6" & 8")

TURBO PUMP

POWER SUPPLY PR10-30-20

POWER SUPPLY EMS 10-60

LOWER POWER SUPPLY AU-40N30-03LC

TREK POWER SUPPLY

SAM POWER SUPPLY P63-30220BI

SCAN APM POWER SUPPLY (VARIAN)

TDI POWER 136957-1R

ESS POWER SUPPLY ( ESS 55-310-2-D)

LAMBDA EMI POWER SUPPLY

SOURCE MAGNET POWER SUPPLY (PR35-22-05LGob(01)

LAMBDA POWER SUPPLY (EMS600-1.6-2-D-GB7A)

EMS POWER SUPPLY (EMS100-10-2-D)

MKS RPS REPAIR

DPSS(DIODE PUMPED SOLID-STATE) LASER REFURBISHIMENT

DPSS(DIODE PUMPED SOLID-STATE) LASER REFURBISHIMENT

ION IMPLANTER POWER SUPPLY LIST

ESC HV POWER SUPPLY (1.5KV)

PVD- IMP CHAMBER INTERLOCK

PED-BIAS PVD CHAMBER INTERLOCK

CDN394 BOARD

WAFER ORIENTER BOARD

VGA BOARD

AIO BOARD

SERIPLEX BOARD

SEI BOARD

OMS BOARD

SHINKO BOARD

SBC BOARD

INTERFACE BOARD

AMAT MAGNET

MAGNET ASSY

MKS BARATRON

CERAMIC ESC

MCA HEATER

CERAMIC HEATER

CKD VALVE

VALVE CONTROLLER

SMC/V-TEX/HVA

AERA MFC

TYLAN MFC

MKS MFC

HORIBA STEC MFC

TMP CONTROLLER REPAIR

MOTOR & MOTOR DRIVER

REPAIR LIST

INJECTION VALVE(SYSTEM)

UNIT MFC

BOARD REPAIR LIST

MKS CAPACITANCE MANOMETER(BARATRON)

INJECTION VALAVE

LFM

LIST(AVAILABLE)

AMAT DTCU

INTERFEROMETER LASER HEAD (ASML)

INTERFEROMETER LASER HEAD (ZYGO)

INTERFEROMETER LASER HEAD (HP)

AXCELIS ESC

NOVELLUS ESC(INOVA)

AFFINITY CHILLER

NESLAB CHILLER

EBARA/VARIAN/MITSUBISHI

OSAKA / ALCATEL

SHIMADZU/ULVAC

Pfeiffer-Vacuum Turbo Pump

LEYBOLD / TMP Series

EDWARDS TURBO PUMP

NESLAB CHILLER

NOVELLUS CONTROLLER REPAIR

NOVELLUS CERAMIC DOME REPAIR

BROOKS MAG7 ROBOT