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REPAIR SERVICE
CHILLER(NESLAB, AFFINITY)
- AMAT APPLICATOR TUBE
- AMAT DTCU
- AMAT MAGNET
- AMAT MONOCHROMATOR
- ASSY UNIT
- BOARD(PCB) REPAIR
- CERAMIC HEATER
- CHILLER(NESLAB, AFFINITY)
- ESC
- LASER HEAD
- MEASURING INSTRUMNETS
- MFC & BARATRON & mks PRESSURE CONTROLLER
- MOTOR & DRIVER
- NOVELLUS CERAMIC DOME
- NOVELLUS CONTROLLER
- OZONE(INUSA & MKS & SUMITOMO )
- POWER SUPPLY & GENERATOR & MATCHER
- PUMP ( DRY & TMP & CRYO )
- REMOTE PLASMA SOURCE
- ROBOT
- ROTARY JOINT(UNION)
- SMC CONTROLLER & ASYST INDEXER
- TEL TRACK HOT PLATE & COOL PLATE OH
- TEMP CONTROLLER
- VALVE ( VAT & SMC & V-TEX & KITZ & MKS etc )
- VARIAN ION IMPLANTER
Category Selection
NESLAB CHILLER HX-150
NESLAB CHILLER
MODEL : HX-150 BOM NO: 304216060203 
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NESLAB CHILLER
NESLAB CHILLER
MODEL : MX-500 BOM NO: 293229751601
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AFFINITY CHILLER
AFFINITY CHILLER
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NESLAB CHILLER
NESLAB CHILLER
BOM#：327027991701 (AMAT Parts No. ： 0190-76118) - SYSTEM3(NEW) - HEAT EXCHANGER
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NESLAB CHILLER
NESLAB CHILLER
BOM#：327099990101 (AMAT Parts No. ： 0190-20058) - SYSTEM3 (OLD) - HEAT EXCHANGER
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NO.1415,TECHNO VALLEY U1, 92 JOMARU-RO 385 BEON-GIL, BUCHEON-SI,GYEONGGI-DO,14558, KOREA
TEL 82-32-672-0815
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