DESCRIPTION | ITEMS | Remarks |
---|---|---|
AMAT | - ETCHING - CVD - PVD - ION IMPLANTER - CMP |
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LAM | - ETCHING | View |
NOVELLUS | - CVD | View |
FURNACE(TEL, KOKUSAI) | - ETCHING - PHOTO |
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NIKON | - PHOTO | View |
ASML | - PHOTO | View |
HITACHI CD SEM | - INSPECTION - METROLOGY |
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VARIAN | - ION IMPLANTER | View |
KLA TENCOR | - PATTERN DF INSPECTION - FILM THICKNESS & RS MEASUREMENT SYSTEM - BRIGHT FIELD, DARK FIELD NON-PATTERN & PATTERN INSPECTION APPLICATION - OVERLAY - NON SEMI PRODUCTS - |
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