DESCRIPTION | ITEMS | Remarks |
---|---|---|
MFC & BARATRON & mks PRESSURE CONTROLLER | - MFC Repair ( LIST ) - MKS BARATRON REPAIR - MKS PRESSURE CONTROLLER |
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NOVELLUS CERAMIC DOME | -Novellus Ceramic Dome Repair | View |
AMAT DTCU | AMAT DTCU REPAIR | View |
VALVE ( VAT & SMC & V-TEX & KITZ & MKS etc ) | -MKS VACUUM VALVE Repair -HORIBA INJECTION VALVE Repair -SMC VALVE& CYLINDER Repair -V-TEX, KITZ VALVE Repair -VAT VALVE Repair -CKD VALVE Repair -VALVE CONTROLLER REPAIR |
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AMAT MAGNET | AMAT MAGNET REFURBISHIMENT FOR ENDURA | View |
POWER SUPPLY & GENERATOR & MATCHER | -AMAT ESC POWER SUPPLY -ION IMPLANTER POWR SUPPLY -NOVELLUS ESC POWER SUPPLY -GENERATOR -MATCHER |
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REMOTE PLASMA SOURCE | -RPS(REMOTE PLASMA SOURCE)REPAIR | View |
OZONE(INUSA & MKS & SUMITOMO ) | - MKS OZONE GENERATOR O/H | View |
AMAT MONOCHROMATOR | AMAT MONOCHROMATOR REPAIR(0010-10556) | View |
ROTARY JOINT(UNION) | ROTARY JOINT(UNION) Repair - EBARA - AMAT |
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TEMP CONTROLLER | ESC TEMP CONTROLLER REPAIR | View |
PUMP ( DRY & TMP & CRYO ) | -TURBO PUMP Repair (OVERHAUL ( Repair) & PARTS Supply) -DRYPUMP OVERHAUL KIT Supply(EBARA, EDWARDS, ALCATEL ETC) -BEARING SET Supply for TURBO PUMP Repair |
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BOARD(PCB) REPAIR | - AMAT BOARD - LAM BOARD - TEL BOARD - ION IMPLANTER BOARD ETC |
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AMAT APPLICATOR TUBE | AMAT APPLICATOR TUBE REPAIR | View |
MEASURING INSTRUMNETS | - CRYSTAL MONITOR(INFICON) - OPTICAL MONITOR |
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TEL TRACK HOT PLATE & COOL PLATE OH | TEL TRACK HOT PLATE & COOL PLATE OH | View |
SMC CONTROLLER & ASYST INDEXER | - TEMP CONTROLLER REPAIR | View |
VARIAN ION IMPLANTER | View | |
ASSY UNIT | View | |
NOVELLUS CONTROLLER | C-2 1 02-152902-00 SYSTEM CONTROLLER 2 02-157591-00 SYSTEM CONTROLLER 3 02-105157-00 SYSTEM CONTROLLER 4 02-127707-00 SYSTEM CONTROLLER 5 02-145682-00 SYSTEM CONTROLLER 6 02-028522-00 SYSTEM CONTROLLER 7 02-113640-00 SYSTEM CONTROLLER 8 02-034310-00 MODULE CONTROLLER 9 02-132030-00 MODULE CONTROLLER 10 02-105005-00 MODULE CONTROLLER 11 02-113639-00 MODULE CONTROLLER 12 02-127708-00 MODULE CONTROLLER 13 02-116798-00 MODULE CONTROLLER MC1 CHASE CONTROLLER 1 02-136488-00 CHASE CONTROLLER 2 02-279391-00 CHASE CONTROLLER C-3 MC3 / MC3R CONTROLLER 1 02-321865-00 SYSTEM/MODULE CONTROLLER 2 02-406010-00 SYSTEM/MODULE CONTROLLER 3 02-321899-00 SYSTEM CONTROLLER 4 02-257935-00 SYSTEM CONTROLLER 5 02-257829-00 SYSTEM CONTROLLER 6 02-272554-00 SYSTEM CONTROLLER 7 02-253704-00 MODULE CONTROLLER 8 02-253705-00 MODULE CONTROLLER 9 02-267883-00 MODULE CONTROLLER MC4 CONTROLLER 1 685-151547-101 SYSTEM/MODULE CONTROLLER 2 02-415129-00 SYSTEM/MODULE CONTROLLER EC1 CONTROLLER 1 61-344687-00 SYSTEM/MODULE CONTROLLER EC2 CONTROLLER 1 63-441957-00 SYSTEM/MODULE CONTROLLER |
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CHILLER(NESLAB, AFFINITY) | CHILLER REPAIR | View |
LASER HEAD | -HP 5517 A,B,C -ZYGO 7701,7702,7712 -ASML GREEN,RED LASER、HE-NE LASER -DPSS LASER FOR METROLOGY & INSPECTION FOR KLATENCOR, HITACHI CD-SEM |
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CERAMIC HEATER | CERAMIC HEATER REPAIR | View |
ROBOT | - Brooks Automation Robot - AMAT HP/VHP ROBOT - PRI ROBOT - ZENMARK ROBOT - AKT ROBOT |
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MOTOR & DRIVER | -YASKAWA SERVO MOTOR/DRIVER Repair -ORIENTAL VEXTA STEPPING MOTOR/DRIVER Repair -HARMONIC DRIVER ACTUATOR Repair -SANKYO MOTOR Repair(for LCD) -DD MOTOR,DC MOTOR,MINI MOTOR Repair -Panasonic Motor Repair etc. |
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ESC | -AMAT CERAMIC ESC Repair Supply -LAM CERAMIC ESC Repair Service -LAM AL ESC Supply -AMAT POLYIMIDE ESC Repair/Brand new Supply - TEL POLYIMIDE ESCRepair / Brand new Supply - AMAT CERAMIC HEATER Repair Service - (MCA HEATER,DXZ HEATER etc) |
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