BUSINESS

Repair Service

DESCRIPTION ITEMS Remarks
MFC & BARATRON & mks PRESSURE CONTROLLER - MFC Repair ( LIST )
- MKS BARATRON REPAIR
- MKS PRESSURE CONTROLLER		 View
NOVELLUS CERAMIC DOME -Novellus Ceramic Dome Repair View
AMAT DTCU AMAT DTCU REPAIR View
VALVE ( VAT & SMC & V-TEX & KITZ & MKS etc ) -MKS VACUUM VALVE Repair
-HORIBA INJECTION VALVE Repair
-SMC VALVE& CYLINDER Repair
-V-TEX, KITZ VALVE Repair
-VAT VALVE Repair
-CKD VALVE Repair
-VALVE CONTROLLER REPAIR		 View
AMAT MAGNET AMAT MAGNET REFURBISHIMENT FOR ENDURA View
POWER SUPPLY & GENERATOR & MATCHER -AMAT ESC POWER SUPPLY
-ION IMPLANTER POWR SUPPLY
-NOVELLUS ESC POWER SUPPLY
-GENERATOR
-MATCHER		 View
REMOTE PLASMA SOURCE -RPS(REMOTE PLASMA SOURCE)REPAIR View
OZONE(INUSA & MKS & SUMITOMO ) - MKS OZONE GENERATOR O/H View
AMAT MONOCHROMATOR AMAT MONOCHROMATOR REPAIR(0010-10556) View
ROTARY JOINT(UNION) ROTARY JOINT(UNION) Repair
- EBARA
- AMAT		 View
TEMP CONTROLLER ESC TEMP CONTROLLER REPAIR View
PUMP ( DRY & TMP & CRYO ) -TURBO PUMP Repair (OVERHAUL ( Repair) & PARTS Supply)
-DRYPUMP OVERHAUL KIT Supply(EBARA, EDWARDS, ALCATEL ETC)
-BEARING　SET Supply for TURBO PUMP Repair		 View
BOARD(PCB) REPAIR - AMAT BOARD
- LAM BOARD
- TEL BOARD
- ION IMPLANTER BOARD ETC		 View
AMAT APPLICATOR TUBE AMAT APPLICATOR TUBE REPAIR View
MEASURING INSTRUMNETS - CRYSTAL MONITOR(INFICON)
- OPTICAL MONITOR		 View
TEL TRACK HOT PLATE & COOL PLATE OH TEL TRACK HOT PLATE & COOL PLATE OH View
SMC CONTROLLER & ASYST INDEXER - TEMP CONTROLLER REPAIR View
VARIAN ION IMPLANTER View
ASSY UNIT View
NOVELLUS CONTROLLER C-2
1 02-152902-00 SYSTEM CONTROLLER
2 02-157591-00 SYSTEM CONTROLLER
3 02-105157-00 SYSTEM CONTROLLER
4 02-127707-00 SYSTEM CONTROLLER
5 02-145682-00 SYSTEM CONTROLLER
6 02-028522-00 SYSTEM CONTROLLER
7 02-113640-00 SYSTEM CONTROLLER
8 02-034310-00 MODULE CONTROLLER
9 02-132030-00 MODULE CONTROLLER
10 02-105005-00 MODULE CONTROLLER
11 02-113639-00 MODULE CONTROLLER
12 02-127708-00 MODULE CONTROLLER
13 02-116798-00 MODULE CONTROLLER

MC1 CHASE CONTROLLER
1 02-136488-00 CHASE CONTROLLER
2 02-279391-00 CHASE CONTROLLER

C-3 MC3 / MC3R CONTROLLER
1 02-321865-00 SYSTEM/MODULE CONTROLLER
2 02-406010-00 SYSTEM/MODULE CONTROLLER
3 02-321899-00 SYSTEM CONTROLLER
4 02-257935-00 SYSTEM CONTROLLER
5 02-257829-00 SYSTEM CONTROLLER
6 02-272554-00 SYSTEM CONTROLLER
7 02-253704-00 MODULE CONTROLLER
8 02-253705-00 MODULE CONTROLLER
9 02-267883-00 MODULE CONTROLLER

MC4 CONTROLLER
1 685-151547-101 SYSTEM/MODULE CONTROLLER
2 02-415129-00 SYSTEM/MODULE CONTROLLER

EC1 CONTROLLER
1 61-344687-00 SYSTEM/MODULE CONTROLLER

EC2 CONTROLLER
1 63-441957-00 SYSTEM/MODULE CONTROLLER		 View
CHILLER(NESLAB, AFFINITY) CHILLER REPAIR View
LASER HEAD -HP 5517 A,B,C
-ZYGO 7701,7702,7712
-ASML GREEN,RED　LASER、HE-NE LASER
-DPSS LASER FOR METROLOGY & INSPECTION FOR KLATENCOR, HITACHI CD-SEM		 View
CERAMIC HEATER CERAMIC HEATER REPAIR View
ROBOT - Brooks Automation Robot
- AMAT HP/VHP ROBOT
- PRI ROBOT
- ZENMARK ROBOT
- AKT ROBOT		 View
MOTOR & DRIVER -YASKAWA SERVO MOTOR/DRIVER Repair
-ORIENTAL VEXTA STEPPING MOTOR/DRIVER Repair
-HARMONIC DRIVER ACTUATOR Repair
-SANKYO MOTOR Repair(for LCD)
-DD MOTOR,DC MOTOR,MINI MOTOR Repair
-Panasonic Motor Repair etc.		 View
ESC -AMAT CERAMIC ESC Repair Supply
-LAM CERAMIC ESC Repair Service
-LAM AL ESC Supply
-AMAT POLYIMIDE ESC Repair/Brand new Supply
- TEL POLYIMIDE ESCRepair / Brand new Supply
- AMAT CERAMIC HEATER Repair Service
- (MCA HEATER,DXZ HEATER etc)		 View