ITEM | DESCRIPTTION & PARTS NO |
---|---|
MFC REPAIR(ANALOG TYPE) | REPAIR(ATTACHED LIST) |
MFC REPAIR(LARGE CAPACITY), flow rate over 10L | SEC-4600(R),SEC-4500,SEC-4550 SEC-G111AMC, FC-786Y-B(30SLM), FC-771AC(50SLM) |
MFC REPAIR(SUPER LARGE CAPACITY), flow rate over 100SLM | UNIT3000,FC772C, SEC4500(200s1m), SEC-4600M |
MFC REPAIR(DIGITAL TYPE) | SEC-G111AMC,SEC-Z511,Z512,Z522,Z524,C-Z313MC,UFC8161, UFC1661,UFC8565, IFC125CREPAIR, V-110DM,V-111DM |
HORIBA LFM 310(410)REPAIR(3870-02238, 3870-04383) | 310 & 410 |
AMAT INJECTION VALVE(HORIBA) REPAIR | IV2410,IV241,REPAIR |
INJECTION SYSTEM(HORIBA) REPAIR | VC1410,VC1310REPAIR |
TYLAN MFC ( 3030-16950 ) | VC-4900MEPR-4V750SCCMH2OVEPOR |
MKS BARATRON REPAIR | |
MKS CAPACITANCE MANOMETER ( BARATRON ) | 625B11TCEEB |
MKS CAPACITANCE MANOMETER ( BARATRON ) | 625D11TCEEB |
MKS CAPACITANCE MANOMETER ( BARATRON ) | 626A11TBE |
MKS CAPACITANCE MANOMETER ( BARATRON ) | 626A13TBE |
MKS CAPACITANCE MANOMETER ( BARATRON ) | 626B01TBE |
MKS CAPACITANCE MANOMETER ( BARATRON ) | 631D11T8FHBB |
MKS CAPACITANCE MANOMETER ( BARATRON ) | 631D13T8FHBB |
MKS CAPACITANCE MANOMETER ( BARATRON ) | CALIBRATION |
INTERFEROMETER LASER HEAD REPAIR | HP5517A |
HP5517B | |
HP5517C | |
ZYG07702 | |
ZYG07712.7714 | |
GREEN LASER | |
RED LASER | |
ZERO LASER | |
DPSS LASER HEAD REPAIR | COHENRENT AVIA532-30 LASER SET |
Lightwave M110 (SPW, LPW) | |
AMAT POWER SUPPLY & OTHER BOARD REPAIR | |
SBC V452 | 0090-76133,0090-03467 |
SBC V440 | 0090-76109 |
SBC V21 | 0090-76111 |
VME PIII 400MHZ | 0660-00032 |
P-5000 CHOPPER DRIVER PWB | 0100-00011,0100-51017 |
MEI board | 0190-14502 |
VGA video controller board | 0190-75084,0190-70102,0190-76050 ,0100-00793 |
SEI Board(SYSTEM ELECTRONICS INTERFACE BD.ASSY) | 0100-01996,0100-00398,0100-20001 |
ANALOG I/O Board | 0100-20100,0100-00825,0190-35653,0100-00396 |
MINI AI/AO BOARD | 0100-09022 REV.H |
Analog Input Board | 0100-09054,0190-21157 |
Analog Output Board | 0100-1101 |
Digital I/O Board | 0100-01321,0100-11002,0100-20003,0100-76124 |
Stepper Controller Board | 0100-20173 |
OMS Board | 0190-01227,0190-76005 |
SERIPLEX MUX BOARD | 0190-35651,300299-083 |
OTF Centerfinder Board | 0100-76042,0100-01985 |
Chamber Interface 5200 HDP-CVD Ultima | 0100-00493 |
Chamber Interface Board | 0100-35250 |
Mainframe Interface Board | 0100-00265 |
Analog Sync Detect Board | 0100-20066 |
64 CHANNEL MUX Board | 0100-20000 |
SYSTEM ELETRONICS INTERFACE B/D ASSY | 0100-20001 |
SERIPLEX MUX I/O Board | 0190-35650,0190-35651 |
Seriplex SPX-MUXADIO-001 | 0190-35775 |
TC AMP Interlock | 0100-00241 |
THERMALOGIC Board | 0660-00221 |
Wafer Orienter Board | 0100-76259,0100-20069 |
CONT ASSY,PRESS PNEU(AMAT CMP ANALOG BOARD, PNEUTRONICS) | 0500-01091 |
AMAT INTER LOCK BOARD | 0100-00573, 0190-00285 |
MKS CDN 396R BOARD | 0190-24116, 0190-01270 |
AMAT(300MM) PVD CHAMBER INTER LOCK BOARD REVO2 | 0190-00285,0090-03868 |
PVD/IMP CHAMBER INTER LOCK BOARD | 0180-00328,0100-20458 |
PED-BIAS CHBR I/L PCB BOARD | 0090-03710 |
AS GAS HEATER CONTROL BOARD | 0100-01911 |
INTL GAS HEATER CONTROL BOARD | 0100-02048 |
AMAT CVD INTERGACE BOARD | 0190-22844 |
APPLIED MATERIALS PCB, CONFIGURABLE INTERLOCK W/ | 0190-00285, 0100-20458 |
APPLIED MATERIALS PCB, FOUR CHANNEL DEVICENET DNP-CPCI-3U-4-NC(SCANNER) | 0190-07908 |
AMAT 15V POWER SUPPLY | 0010-20498, 0010-20044, UBJMLXPX1930(LAMBDA DC POWER SUPPLY) |
PVD HEATER DRIVER | 0190-76244 |
AMAT LAMP DRIVER | 0190-09395 |
MASA POWER SYS BOARD | 0190-08875 |
PCB ASSY LOWER PNEUMATIC(BOARD) | 0100-77017,VAL-0-1824-08 |
AMAT CMP Digital Card(Dual Cont Assy) | 990-004765-124 |
AMAT CMP ANALOG CARD | 990-004763-015 |
ENI DPGS-10-CE REPAIR | 0190-36342 REV A |
TREK ESC POWER SUPPLY MODEL 684-1-L-CE | 19-137359-00 |
ASM SLAVE6 BUS SLAVE FIH1268 | 70065-00009-E |
PT-VME 330B(performance technologies) | 120P027420 D/C 3401 |
MVME 162-223 MOTOROLA ENET-MC | ETHERNET ADDRESS 0001AF2DA |
HITACHI MMPC-03A BOARD | MMPC-03A |
MKS Smart Match(TUNER 1/4-GUIDE WL 2.45GHZ 3KW W/3 STUBS ASP(3750- 01106)REPAIR | STANDARD REPAIR |
FULL 0/H | |
MKS magnetron head REPAIR | MAGNATRON ASSY, 1500 WATTS 0190-09769 |
MKS RPS(REMOTE PLASMA SOURCE)repair | 2L |
3L | |
6L | |
22L | |
REVOLUTION2 | |
REVOLUTION3 | |
MKS OZONE GENERATOR REPAIR | AX8200(A,D),CELL 6EA |
AX-8401,CELL 8EA | |
AX-8402, CELL 8EA | |
AX-8403(A), CELL 8EA | |
AX-8404, CELL 8EA | |
AX-8406B, CELL 10EA | |
AX-8407(A,HC), 14EA | |
AX-8561-5052, CELL 6EA | |
SUMITOMO SU-01CN | |
MKS 307 Vacuum Gauge Controller (Ion gauge controller) | 307005/06 |
MKS PRESSURE CONTROLLER 152 TYPE | REPAIR |
INUSA dFFOZ OZONE SENSOR | REPAIR |
INUSA gFFOZ OZONE SENSOR | |
IN USA SENSOR CONTROL INTERFACR MODEL SCI-PLUS REPAIR | 0190-35874 |
INUSA HAMAT-4 | |
IN USA OZONE濃度計 | |
PCB ASSY 5 PHASE STEPPER DRIVER INTERFAC | 0100-35353 |
AMAT MONOCHROMATOR(EPD) | 0010-00745,0010-09935, STANDARD REPAIR |
FULL 0/H(PMT(PHOTO MULTIPLIER TUBE CHANGE) | |
TOUCH MONITOR REPAIR | D1G10029-01 |
FUJI DENKI UD41H-AET2 | |
JAPAN AVIATION ELECTRONICS UT3-15BX1RD11001 | |
IFP367 | |
D710TFT 1 0 WTSB | |
ESC新品及びREPAIR | AXCELIS ESC(0952-0241-001)REPAIR |
LAM AL( 6 "& 8", NEW,718-094523-281,718-094523-281,718-094756-081) | |
TEL POLYIMIDE(REPAIR,DRM,SCCM) | |
AMAT POLYIMIDE(REPAIR, DPS-METAL,DPS-POLY, MXP-POLY,MXP-METAL,) | |
AMAT MXP+ OXIDE ESC(0040-99952,NEW) | |
AMAT MXP ESC 145MM R2(0040-99996,NEW) | |
AMAT MAGNET(NEW & REPAIR) | 0010-21844 REPAIR |
0010-21844 NEW | |
0010-26439(0010-20225) REPAIR | |
0010-26439(0010-20225) NEW | |
0010-21676 REPAIR | |
0010-21676 NEW | |
0010-20223 REPAIR | |
0010-20223 NEW | |
0010-26438(0010-20224) REPAIR | |
0010-26438(0010-20224) NEW | |
0010-26451(0020-22153) REPAIR | |
0010-26451(0020-22153) NEW | |
AMAT METAL PARTS(NEW) | DPS UPPER CHAMBER(0020-33806) |
Mxp Chamber(0040-09723) | |
R2 CHAMBER(0040-09893) | |
PLATE,PERF 8" EC WXZ (0020-42287) | |
LIFT RING(0040-31981) | |
PLATE PERF OXIDE 200MM(0020-10117) | |
FACEPLATE, GIGA-FILL SACVD, BPSG CENT 23(0021-01572) | |
Dxz Teos Faceplate (No Center Hole)(0021-00042) | |
BLOCKER PLATE(0020-10191) | |
PLATE BLOCKER DXZ(0020-34445) | |
FACE PLATEU SG)E111\10 CENT(0021-03489) | |
(ARC)PERF PLATE 200MM(0020-30797) | |
(IL)H-NI FACE PLATE(0021-03637) | |
(DXZ)BLOCER PLATE(0020-32036) | |
(C.L)BLOCKER PLATE(TEOS)(0020-34445) | |
ARC BLOCKER PLATE(0020-10936) | |
(BPSG)BLOCKER PLATE(0021-09914) | |
SIC GDP(NEW,MADE IN KOREA) | |
SIC GDP(NEW,ROHM&HAAS METERIAL) | |
LID PLATE SSGD R2 CHAMBER(0021-39385) | |
PEDESTAL ASSY OX(0010-09919) | |
P-5000 ETCH CATHODE(0040-09005) | |
AMAT MxP Poly GDP 133 HOLES (P/N: 0021-41125) | |
DPS CERAMIC WAFER LIFT PIN (P/N: 0010-23726) | |
GDP ( 0021-41125 ) | |
PROBE MOUNT ASSY SAPHIRE-PROBE(0190-18430) | |
"PUMP 0/H KIT BEARING SET ( EBARA & EDWARDS DRY PUMP, SEIKO SEIKI TURBO PUMP)" |
P028(STP-H2002C) BEARING SET |
P026(STP0751E) BEARING SET | |
P023(STP-2001K) BEARING SET | |
P036(STP-A1303) | |
P039(STP-1003C) BEARING SET | |
PO41(STP-A2203P) BEARING SET | |
P013(STP-1000C) BEARING SET | |
P017(STP-H1000) BEARING SET | |
P001(STP-300,STP-400) BEARING SET | |
P019(STP-H2000K) BEARING SET | |
LOWER BEARING SET for Shimadzu 1169(6911) | |
LOWER BEARING SET for Shimadzu 7905 | |
UPPER BEARING SET for Osaka 6909 | |
LOWER BEARING SET for Osaka 7904 | |
EBARA ET-1600 BEARING SET | |
EBARA ET-600 BEARING SET | |
EBARA ET-300WS BEARING SET | |
EBARA ET-300WS BEARING SET | |
EBARA A3OW OVERHAUL SERVICE KIT | |
EBARA A7OW OVERHAUL SERVICE KIT | |
EBARA AA30 OVERHAUL SERVICE KIT | |
SHIMADZU TURBO PUMP TMP3403LMEC BEARING SET | |
SHIMADZU TURBO PUMP TMP303LM BEARING SET | |
EBARA A15OW OVERHAUL SERVICE KIT | |
EBARA DRY PUMP BEARING 5205 | |
EBARA DRY PUMP BEARING 5206 | |
EBARA DRY PUMP BEARING 5207 | |
EBARA DRY PUMP BEARING 6005ZZ(CREEP FREE) | |
EBARA DRY PUMP BEARING 6006ZZ(CREEP FREE) | |
EBARA DRY PUMP BEARING 6205Z(CREEP FREE) | |
EBARA DRY PUMP BEARING 6206Z(CREEP FREE) | |
EDWARDS DRY PUMP QDP40, QDP80 OVERHAUL SERVICE KIT | |
EDWARDS DRY PUMP BOOSTER QMB250,QMB500 OVERHAUL SERVICE KIT | |
EDWARDS DRY PUMP IH80 OVERHAUL SERVICE KIT | |
EDWARDS DRY PUMP H80 OVERHAUL SERVICE KIT & BOOSTER IH600/1000 KIT SET | |
BEARING DRY PUMP HOUSING 6005ZZ | |
BEARING DRY PUMP HOUSING 6006ZZ | |
0-RING AS568 D-143 | |
0-RING AS568 NW80 | |
MKS RPS | REVOLUTION |
CERAMIC HEATER(0040-02538, ) | CAP交換 |
CAP交換+再生 | |
MCA HEATER | ENDURA300HIGH-TEMP E-CHUCK0010-23066(P5f11, 12INCH) |
ENDURA U HIGH-TEMP E-CHUCK0010-27430(P2f11, 8INCH) | |
ENDURA II LOW-TEMP E-CHUCK(8INCH) | |
V-TEX GATE VALVE REPAIR | V-TEX GATE VALVE |
S10 VAT GATE VALVE REPAIR | 10846-UA24, 10846-UE24 |
S12 GATE VALVE REPAIR | 12046-PE24-AAG1(3870-02561) |
SMC GATE VALVE REPAIR | XGT200-30-1A-X5S REVC |
CENTURA SMC SLIT VALVE | 3020-01052(0020-22413) SMC-200 |
VAT APC VALVE | 61540-XHGH-AQZ1/0010(CONTROLLERM) |
VAT PENDULEM VALVE REPAIR | 65050-3H52 |
VAT VALVE CONTROLLER REPAIR | PM-5 |
PM-6 | |
PM-7 | |
AMAT SLIT VALVE CYLINDER(ACTUATOR) REPAIR | 0050-82654 |
AMAT VESPEL PART SET | VESPEL SCREW(0020-31740) |
VESPEL LIFT POST(0020-32048) | |
AMAT DTCU(METAL & POLY) | HR DTCU(AMAT P/No : 0010-38754),REPAIR |
EBARA(CMP PROCESS) | MS-30021-1,ROTARY JOINT 51 TYPE,REPAIR |
JOINT TOP RING(C-2110-81-0001) | |
EBARA ROTARY JOINT REPAIR | |
ELBOW(112),TOP RING(C-2105-465-0001) | |
AMAT ROTARY UNION REPAIR FOR CMP | DEUBLIN |
AMAT ROTARY UNION REPAIR ENDURA | DEUBLIN |
LAM ELECTRODE | ELECTRODE ALUM,ANDZ 8INCH |
CKD VALVE REPAIR | STANDARD REPAIR |
BELLOWS CHANGE | |
VALVE DISK(BELLOWS CAP)CHANGE | |
BOARD CHANGE | |
AIR BLOCK CHANGE | |
CYLINDER CHANGE | |
PISTON CHANGE | |
SHAFT CHANGE | |
OUTER HEATER CHANGE | |
RING HEATER CHANGE | |
BY-PASS VALVE CHANGE | |
BROOKS ROBOT & ARM SET REPAIR | MTR-5 ROBOT DRIVER(NVLS,001-7600-07) |
Mag 7.0,Mag7.1 Arm Set Novellus(002-0016-14) | |
BROOKS MAG7(002-1500-17) | |
BROOKS ATM-105(ATM-105,ATM105-1-CE,ATM107-2-S-CE) PRI ROBOT | |
AMAT VHP & HP ROBOT 0/H (EXCHANGE) | VHP & VHP+ ( 0/H) |
VHP & VHP+ (EXCHANGE) | |
HP UPPER / LOWER(0/H) | |
HP UPPER / LOWER(EXCHANGE) | |
ION IMPLANTER POWER SUPPLY REPAIR | MATSUSADA SOURCE MAGNET POWER SUPPLY(PR35-22-05) |
MATSUSADA SOURCE MAGNET POWER SUPPLY(PR35-22-87-Lgob(01)) | |
MATSUSADA CATHODE POWER SUPPLY(PR600-1.6-12) | |
MATSUSADA CATHODE POWER SUPPLY(PR600-1.6-96) | |
MATSUSADA AEF LOWER POWER SUPPLY(AU-40N30-03LC) | |
MATSUSADA AEF LOWER POWER SUPPLY(AU-10N30-LC) | |
MATSUSADA AEF LOWER POWER SUPPLY(PR85-40N30-03LC) | |
EXTRACTION POWER SUPPLY(GLASSMAN PS/LH065P075GV6) | |
TREK SCAN AMP(PA04003A, E19283622 REVOA) | |
LAMBDA CATHODE POWER SUPPLY(004731373) | |
LAMBDA EMS 40-25-2-D | |
LAMBDA EMS 5-200-2-D | |
LAMBDA EMS 6-200 | |
LAMBDA EMS 10-60-2-D | |
LAMBDA EMS 100-10-2-D-LB | |
LAMBDA EMS 150-7 | |
LAMBDA EMS 600-1.6-2-D | |
LAMBDA EMS 16-60-1-D-TC-1607 | |
LAMBDA ARC POWER SUPPLY | |
LAMBDA EMS 60-165-2-D-0981 | |
PWR SUP,MAGNET,10.2KW(90°MAGNET P.S,E19296980) | |
POWER TEN INC P63C-30220A(0017C-0018) | |
SOURCE DI ELERIC BOARD(1550400) | |
NOVELLUS MC1 MC3 CONTROLLER REPAIR | |
Assy,Sys Controller,P100/16M | 02-028522-00 |
Assy, Sys CntrI,P166/64 | 02-113640-00 |
System Cont Assy, P166/64 Meg +24V | 02-127707-00 |
Computer Assy, P166 Chase Control | 02-136488-00 |
System Controller, 166/64M, QNX4 (PET) | 02-152902-00 |
SIOC CONTROLLER | 27-152970-00 |
27-053659-00 | |
IOC CONTROLLER | 27-10157-00 |
Assy, MC3E, Moducle Controller | 02-253704-00 |
Assy, MC3A, Moducle Controller | 02-253705-00 |
MC3E,Platform Controller, Ethernet | 02-257935-00 |
Assy,Mod Cont,P100/16M | 02-034310-00 |
Module Controller Assy, P166, 24V | 02-103970-00 |
MC3A, System Controller | 02-267883-00 |
MC3A, DLCM Module Controller | 02-272554-00 |
MC3R Assy, Ethernet | 02-321865-00 |
MC1 Module Controller P166/64 5/12V | 02-113639-00 |
Mod Cntrlr Assy, P166/64 Meg, +24 V | 02-127708-00 |
Module Controller Assy, P166, 8 COM | 02-128745-00 |
Module Controller, P166, PET | 02-148806-00 |
Assy, Mod Cntrl, P166/64, QNX4 | 02-132030-00 |
ISIOC HCM APVD | 02-125106-00 REV B |
HDP HDSIOC 1 | 02-264189-00 REV A(FIRM WARE VERSION 4.72) |
HDP 300 SIOC 0 | 02-262490-00 REV A |
HDP 300 SIOC INTELOCK | 02-109467-00 REV B |
WTS 1 INTERLOCK | 02-052787-00 |
MODULE CONTROLLER MAIN BOARD | EXCHANGE |
ARCNET CARD | EXCHANGE |
RS485 CARD(BOARD) | EXCHNAGE |
RS485 CARD(BOARD) | REPAIR |
SIOC POWER SUPPLY | 27-053660-00 REV A |
NOVELLUS MC1 MC3CONTROLLER REPAIR(MAIN BOARD) EXCHANGE | |
HDD & SOFT WAREみ対応 | |
ONLY SOFT WAREのみ対応 | |
MC1 P4 SPEC(MADE IN KOREA, NEW) | |
MC3 P4 SPEC(MADE IN KOREA, NEW) | |
VERITY SD10240-7 SPECTROMETER REPAIR ( novellus ) | |
ENDURA PVD SCR CONTROLLER | 0190-76244 |
TOUCH MONITOR FOR AMAT | NEW |
INR244-404 | REPAIR, SMC INR-244-404 EY-0973 |
CPW電源 | CPW2870 UZ188D1 |
INFICON deposition controller IC/5 | REPAIR |
TEL UNITY BOARD REPAIR | |
Motorola MVME 147-023 | 147-023 S1-PLT0203 |
TEL TVB6004-1 QMC3 VME BOARD | 1208-001184-16 |
TEL TVB9003-1 316 BOARD | 316 3281-000080-11 |
TEL KE-I PCB PST OPT (350) BOARD | 3208-000095-11 FOR TEL P8 WAFER PROBER SYSTEM |
TEL PCB PST-STD | 3281-000146-13, 3208-000146-11 PCI Card |
TEL P-12XL / TVB3102-1/SIO 4CHANNEL VM | 3281-000014-17 |
Tel Tvb3401-1/Gpib | 3208-000019-13 |
TEL FURNACE BOARD REPAIR | |
TEL MC-31050-M | 1181-000428-1D |
TEL MC-31050-P | 1181-000249-1R |
TEL MC-31050-S | 1181-000252-1E |
TEL MC-31050-T | 1181-000451-14 |
TEL MC-31039GA5 | 1181-000450-13 |