COMPANY

Service Item

ITEM LIST PRICE
ITEM DESCRIPTTION & PARTS NO
MFC REPAIR(ANALOG TYPE) REPAIR(ATTACHED LIST)
MFC REPAIR(LARGE CAPACITY), flow rate over 10L SEC-4600(R),SEC-4500,SEC-4550 SEC-G111AMC, FC-786Y-B(30SLM), FC-771AC(50SLM)
MFC REPAIR(SUPER LARGE CAPACITY), flow rate over 100SLM UNIT3000,FC772C, SEC4500(200s1m), SEC-4600M
MFC REPAIR(DIGITAL TYPE) SEC-G111AMC,SEC-Z511,Z512,Z522,Z524,C-Z313MC,UFC8161, UFC1661,UFC8565, IFC125CREPAIR, V-110DM,V-111DM
HORIBA LFM 310(410)REPAIR(3870-02238, 3870-04383) 310 & 410
AMAT INJECTION VALVE(HORIBA) REPAIR IV2410,IV241,REPAIR
INJECTION SYSTEM(HORIBA) REPAIR VC1410,VC1310REPAIR
TYLAN MFC ( 3030-16950 ) VC-4900MEPR-4V750SCCMH2OVEPOR
MKS BARATRON REPAIR
MKS CAPACITANCE MANOMETER ( BARATRON ) 625B11TCEEB
MKS CAPACITANCE MANOMETER ( BARATRON ) 625D11TCEEB
MKS CAPACITANCE MANOMETER ( BARATRON ) 626A11TBE
MKS CAPACITANCE MANOMETER ( BARATRON ) 626A13TBE
MKS CAPACITANCE MANOMETER ( BARATRON ) 626B01TBE
MKS CAPACITANCE MANOMETER ( BARATRON ) 631D11T8FHBB
MKS CAPACITANCE MANOMETER ( BARATRON ) 631D13T8FHBB
MKS CAPACITANCE MANOMETER ( BARATRON ) CALIBRATION
INTERFEROMETER LASER HEAD REPAIR HP5517A
HP5517B
HP5517C
ZYG07702
ZYG07712.7714
GREEN LASER
RED LASER
ZERO LASER
DPSS LASER HEAD REPAIR COHENRENT AVIA532-30 LASER SET
Lightwave M110 (SPW, LPW)
AMAT POWER SUPPLY & OTHER BOARD REPAIR
SBC V452 0090-76133,0090-03467
SBC V440 0090-76109
SBC V21 0090-76111
VME PIII 400MHZ 0660-00032
P-5000 CHOPPER DRIVER PWB 0100-00011,0100-51017
MEI board 0190-14502
VGA video controller board 0190-75084,0190-70102,0190-76050 ,0100-00793
SEI Board(SYSTEM ELECTRONICS INTERFACE BD.ASSY) 0100-01996,0100-00398,0100-20001
ANALOG I/O Board 0100-20100,0100-00825,0190-35653,0100-00396
MINI AI/AO BOARD 0100-09022 REV.H
Analog Input Board 0100-09054,0190-21157
Analog Output Board 0100-1101
Digital I/O Board 0100-01321,0100-11002,0100-20003,0100-76124
Stepper Controller Board 0100-20173
OMS Board 0190-01227,0190-76005
SERIPLEX MUX BOARD 0190-35651,300299-083
OTF Centerfinder Board 0100-76042,0100-01985
Chamber Interface 5200 HDP-CVD Ultima 0100-00493
Chamber Interface Board 0100-35250
Mainframe Interface Board 0100-00265
Analog Sync Detect Board 0100-20066
64 CHANNEL MUX Board 0100-20000
SYSTEM ELETRONICS INTERFACE B/D ASSY 0100-20001
SERIPLEX MUX I/O Board 0190-35650,0190-35651
Seriplex SPX-MUXADIO-001 0190-35775
TC AMP Interlock 0100-00241
THERMALOGIC Board 0660-00221
Wafer Orienter Board 0100-76259,0100-20069
CONT ASSY,PRESS PNEU(AMAT CMP ANALOG BOARD, PNEUTRONICS) 0500-01091
AMAT INTER LOCK BOARD 0100-00573, 0190-00285
MKS CDN 396R BOARD 0190-24116, 0190-01270
AMAT(300MM) PVD CHAMBER INTER LOCK BOARD REVO2 0190-00285,0090-03868
PVD/IMP CHAMBER INTER LOCK BOARD 0180-00328,0100-20458
PED-BIAS CHBR I/L PCB BOARD 0090-03710
AS GAS HEATER CONTROL BOARD 0100-01911
INTL GAS HEATER CONTROL BOARD 0100-02048
AMAT CVD INTERGACE BOARD 0190-22844
APPLIED MATERIALS PCB, CONFIGURABLE INTERLOCK W/ 0190-00285, 0100-20458
APPLIED MATERIALS PCB, FOUR CHANNEL DEVICENET DNP-CPCI-3U-4-NC(SCANNER) 0190-07908
AMAT 15V POWER SUPPLY 0010-20498, 0010-20044, UBJMLXPX1930(LAMBDA DC POWER SUPPLY)
PVD HEATER DRIVER 0190-76244
AMAT LAMP DRIVER 0190-09395
MASA POWER SYS BOARD 0190-08875
PCB ASSY LOWER PNEUMATIC(BOARD) 0100-77017,VAL-0-1824-08
AMAT CMP Digital Card(Dual Cont Assy) 990-004765-124
AMAT CMP ANALOG CARD 990-004763-015
ENI DPGS-10-CE REPAIR 0190-36342 REV A
TREK ESC POWER SUPPLY MODEL 684-1-L-CE 19-137359-00
ASM SLAVE6 BUS SLAVE FIH1268 70065-00009-E
PT-VME 330B(performance technologies) 120P027420 D/C 3401
MVME 162-223 MOTOROLA ENET-MC ETHERNET ADDRESS 0001AF2DA
HITACHI MMPC-03A BOARD MMPC-03A
MKS Smart Match(TUNER 1/4-GUIDE WL 2.45GHZ 3KW W/3 STUBS ASP(3750- 01106)REPAIR STANDARD REPAIR
FULL 0/H
MKS magnetron head REPAIR MAGNATRON ASSY, 1500 WATTS 0190-09769
MKS RPS(REMOTE PLASMA SOURCE)repair 2L
3L
6L
22L
REVOLUTION2
REVOLUTION3
MKS OZONE GENERATOR REPAIR AX8200(A,D),CELL 6EA
AX-8401,CELL 8EA
AX-8402, CELL 8EA
AX-8403(A), CELL 8EA
AX-8404, CELL 8EA
AX-8406B, CELL 10EA
AX-8407(A,HC), 14EA
AX-8561-5052, CELL 6EA
SUMITOMO SU-01CN
MKS 307 Vacuum Gauge Controller (Ion gauge controller) 307005/06
MKS PRESSURE CONTROLLER 152 TYPE REPAIR
INUSA dFFOZ OZONE SENSOR REPAIR
INUSA gFFOZ OZONE SENSOR
IN USA SENSOR CONTROL INTERFACR MODEL SCI-PLUS REPAIR 0190-35874
INUSA HAMAT-4
IN USA OZONE濃度計
PCB ASSY 5 PHASE STEPPER DRIVER INTERFAC 0100-35353
AMAT MONOCHROMATOR(EPD) 0010-00745,0010-09935, STANDARD REPAIR
FULL 0/H(PMT(PHOTO MULTIPLIER TUBE CHANGE)
TOUCH MONITOR REPAIR D1G10029-01
FUJI DENKI UD41H-AET2
JAPAN AVIATION ELECTRONICS UT3-15BX1RD11001
IFP367
D710TFT 1 0 WTSB
ESC新品及びREPAIR AXCELIS ESC(0952-0241-001)REPAIR
LAM AL( 6 "& 8", NEW,718-094523-281,718-094523-281,718-094756-081)
TEL POLYIMIDE(REPAIR,DRM,SCCM)
AMAT POLYIMIDE(REPAIR, DPS-METAL,DPS-POLY, MXP-POLY,MXP-METAL,)
AMAT MXP+ OXIDE ESC(0040-99952,NEW)
AMAT MXP ESC 145MM R2(0040-99996,NEW)
AMAT MAGNET(NEW & REPAIR) 0010-21844 REPAIR
0010-21844 NEW
0010-26439(0010-20225) REPAIR
0010-26439(0010-20225) NEW
0010-21676 REPAIR
0010-21676 NEW
0010-20223 REPAIR
0010-20223 NEW
0010-26438(0010-20224) REPAIR
0010-26438(0010-20224) NEW
0010-26451(0020-22153) REPAIR
0010-26451(0020-22153) NEW
AMAT METAL PARTS(NEW) DPS UPPER CHAMBER(0020-33806)
Mxp Chamber(0040-09723)
R2 CHAMBER(0040-09893)
PLATE,PERF 8" EC WXZ (0020-42287)
LIFT RING(0040-31981)
PLATE PERF OXIDE 200MM(0020-10117)
FACEPLATE, GIGA-FILL SACVD, BPSG CENT 23(0021-01572)
Dxz Teos Faceplate (No Center Hole)(0021-00042)
BLOCKER PLATE(0020-10191)
PLATE BLOCKER DXZ(0020-34445)
FACE PLATEU SG)E111\10 CENT(0021-03489)
(ARC)PERF PLATE 200MM(0020-30797)
(IL)H-NI FACE PLATE(0021-03637)
(DXZ)BLOCER PLATE(0020-32036)
(C.L)BLOCKER PLATE(TEOS)(0020-34445)
ARC BLOCKER PLATE(0020-10936)
(BPSG)BLOCKER PLATE(0021-09914)
SIC GDP(NEW,MADE IN KOREA)
SIC GDP(NEW,ROHM&HAAS METERIAL)
LID PLATE SSGD R2 CHAMBER(0021-39385)
PEDESTAL ASSY OX(0010-09919)
P-5000 ETCH CATHODE(0040-09005)
AMAT MxP Poly GDP 133 HOLES (P/N: 0021-41125)
DPS CERAMIC WAFER LIFT PIN (P/N: 0010-23726)
GDP ( 0021-41125 )
PROBE MOUNT ASSY SAPHIRE-PROBE(0190-18430)
"PUMP 0/H KIT
BEARING SET
( EBARA & EDWARDS DRY PUMP, SEIKO SEIKI TURBO PUMP)"		 P028(STP-H2002C) BEARING SET
P026(STP0751E) BEARING SET
P023(STP-2001K) BEARING SET
P036(STP-A1303)
P039(STP-1003C) BEARING SET
PO41(STP-A2203P) BEARING SET
P013(STP-1000C) BEARING SET
P017(STP-H1000) BEARING SET
P001(STP-300,STP-400) BEARING SET
P019(STP-H2000K) BEARING SET
LOWER BEARING SET for Shimadzu 1169(6911)
LOWER BEARING SET for Shimadzu 7905
UPPER BEARING SET for Osaka 6909
LOWER BEARING SET for Osaka 7904
EBARA ET-1600 BEARING SET
EBARA ET-600 BEARING SET
EBARA ET-300WS BEARING SET
EBARA ET-300WS BEARING SET
EBARA A3OW OVERHAUL SERVICE KIT
EBARA A7OW OVERHAUL SERVICE KIT
EBARA AA30 OVERHAUL SERVICE KIT
SHIMADZU TURBO PUMP TMP3403LMEC BEARING SET
SHIMADZU TURBO PUMP TMP303LM BEARING SET
EBARA A15OW OVERHAUL SERVICE KIT
EBARA DRY PUMP BEARING 5205
EBARA DRY PUMP BEARING 5206
EBARA DRY PUMP BEARING 5207
EBARA DRY PUMP BEARING 6005ZZ(CREEP FREE)
EBARA DRY PUMP BEARING 6006ZZ(CREEP FREE)
EBARA DRY PUMP BEARING 6205Z(CREEP FREE)
EBARA DRY PUMP BEARING 6206Z(CREEP FREE)
EDWARDS DRY PUMP QDP40, QDP80 OVERHAUL SERVICE KIT
EDWARDS DRY PUMP BOOSTER QMB250,QMB500 OVERHAUL SERVICE KIT
EDWARDS DRY PUMP IH80 OVERHAUL SERVICE KIT
EDWARDS DRY PUMP H80 OVERHAUL SERVICE KIT & BOOSTER IH600/1000 KIT SET
BEARING DRY PUMP HOUSING 6005ZZ
BEARING DRY PUMP HOUSING 6006ZZ
0-RING AS568 D-143
0-RING AS568 NW80
MKS RPS REVOLUTION
CERAMIC HEATER(0040-02538, ) CAP交換
CAP交換+再生
MCA HEATER ENDURA300HIGH-TEMP E-CHUCK0010-23066(P5f11, 12INCH)
ENDURA U HIGH-TEMP E-CHUCK0010-27430(P2f11, 8INCH)
ENDURA II LOW-TEMP E-CHUCK(8INCH)
V-TEX GATE VALVE REPAIR V-TEX GATE VALVE
S10 VAT GATE VALVE REPAIR 10846-UA24, 10846-UE24
S12 GATE VALVE REPAIR 12046-PE24-AAG1(3870-02561)
SMC GATE VALVE REPAIR XGT200-30-1A-X5S REVC
CENTURA SMC SLIT VALVE 3020-01052(0020-22413) SMC-200
VAT APC VALVE 61540-XHGH-AQZ1/0010(CONTROLLERM)
VAT PENDULEM VALVE REPAIR 65050-3H52
VAT VALVE CONTROLLER REPAIR PM-5
PM-6
PM-7
AMAT SLIT VALVE CYLINDER(ACTUATOR) REPAIR 0050-82654
AMAT VESPEL PART SET VESPEL SCREW(0020-31740)
VESPEL LIFT POST(0020-32048)
AMAT DTCU(METAL & POLY) HR DTCU(AMAT P/No : 0010-38754),REPAIR
EBARA(CMP PROCESS) MS-30021-1,ROTARY JOINT 51 TYPE,REPAIR
JOINT TOP RING(C-2110-81-0001)
EBARA ROTARY JOINT REPAIR
ELBOW(112),TOP RING(C-2105-465-0001)
AMAT ROTARY UNION REPAIR FOR CMP DEUBLIN
AMAT ROTARY UNION REPAIR ENDURA DEUBLIN
LAM ELECTRODE ELECTRODE ALUM,ANDZ 8INCH
CKD VALVE REPAIR STANDARD REPAIR
BELLOWS CHANGE
VALVE DISK(BELLOWS CAP)CHANGE
BOARD CHANGE
AIR BLOCK CHANGE
CYLINDER CHANGE
PISTON CHANGE
SHAFT CHANGE
OUTER HEATER CHANGE
RING HEATER CHANGE
BY-PASS VALVE CHANGE
BROOKS ROBOT & ARM SET REPAIR MTR-5 ROBOT DRIVER(NVLS,001-7600-07)
Mag 7.0,Mag7.1 Arm Set Novellus(002-0016-14)
BROOKS MAG7(002-1500-17)
BROOKS ATM-105(ATM-105,ATM105-1-CE,ATM107-2-S-CE) PRI ROBOT
AMAT VHP & HP ROBOT 0/H (EXCHANGE) VHP & VHP+ ( 0/H)
VHP & VHP+ (EXCHANGE)
HP UPPER / LOWER(0/H)
HP UPPER / LOWER(EXCHANGE)
ION IMPLANTER POWER SUPPLY REPAIR MATSUSADA SOURCE MAGNET POWER SUPPLY(PR35-22-05)
MATSUSADA SOURCE MAGNET POWER SUPPLY(PR35-22-87-Lgob(01))
MATSUSADA CATHODE POWER SUPPLY(PR600-1.6-12)
MATSUSADA CATHODE POWER SUPPLY(PR600-1.6-96)
MATSUSADA AEF LOWER POWER SUPPLY(AU-40N30-03LC)
MATSUSADA AEF LOWER POWER SUPPLY(AU-10N30-LC)
MATSUSADA AEF LOWER POWER SUPPLY(PR85-40N30-03LC)
EXTRACTION POWER SUPPLY(GLASSMAN PS/LH065P075GV6)
TREK SCAN AMP(PA04003A, E19283622 REVOA)
LAMBDA CATHODE POWER SUPPLY(004731373)
LAMBDA EMS 40-25-2-D
LAMBDA EMS 5-200-2-D
LAMBDA EMS 6-200
LAMBDA EMS 10-60-2-D
LAMBDA EMS 100-10-2-D-LB
LAMBDA EMS 150-7
LAMBDA EMS 600-1.6-2-D
LAMBDA EMS 16-60-1-D-TC-1607
LAMBDA ARC POWER SUPPLY
LAMBDA EMS 60-165-2-D-0981
PWR SUP,MAGNET,10.2KW(90°MAGNET P.S,E19296980)
POWER TEN INC P63C-30220A(0017C-0018)
SOURCE DI ELERIC BOARD(1550400)
NOVELLUS MC1 MC3 CONTROLLER REPAIR
Assy,Sys Controller,P100/16M 02-028522-00
Assy, Sys CntrI,P166/64 02-113640-00
System Cont Assy, P166/64 Meg +24V 02-127707-00
Computer Assy, P166 Chase Control 02-136488-00
System Controller, 166/64M, QNX4 (PET) 02-152902-00
SIOC CONTROLLER 27-152970-00
27-053659-00
IOC CONTROLLER 27-10157-00
Assy, MC3E, Moducle Controller 02-253704-00
Assy, MC3A, Moducle Controller 02-253705-00
MC3E,Platform Controller, Ethernet 02-257935-00
Assy,Mod Cont,P100/16M 02-034310-00
Module Controller Assy, P166, 24V 02-103970-00
MC3A, System Controller 02-267883-00
MC3A, DLCM Module Controller 02-272554-00
MC3R Assy, Ethernet 02-321865-00
MC1 Module Controller P166/64 5/12V 02-113639-00
Mod Cntrlr Assy, P166/64 Meg, +24 V 02-127708-00
Module Controller Assy, P166, 8 COM 02-128745-00
Module Controller, P166, PET 02-148806-00
Assy, Mod Cntrl, P166/64, QNX4 02-132030-00
ISIOC HCM APVD 02-125106-00 REV B
HDP HDSIOC 1 02-264189-00 REV A(FIRM WARE VERSION 4.72)
HDP 300 SIOC 0 02-262490-00 REV A
HDP 300 SIOC INTELOCK 02-109467-00 REV B
WTS 1 INTERLOCK 02-052787-00
MODULE CONTROLLER MAIN BOARD EXCHANGE
ARCNET CARD EXCHANGE
RS485 CARD(BOARD) EXCHNAGE
RS485 CARD(BOARD) REPAIR
SIOC POWER SUPPLY 27-053660-00 REV A
NOVELLUS MC1 MC3CONTROLLER REPAIR(MAIN BOARD) EXCHANGE
HDD & SOFT WAREみ対応
ONLY SOFT WAREのみ対応
MC1 P4 SPEC(MADE IN KOREA, NEW)
MC3 P4 SPEC(MADE IN KOREA, NEW)
VERITY SD10240-7 SPECTROMETER REPAIR ( novellus )
ENDURA PVD SCR CONTROLLER 0190-76244
TOUCH MONITOR FOR AMAT NEW
INR244-404 REPAIR, SMC INR-244-404 EY-0973
CPW電源 CPW2870 UZ188D1
INFICON deposition controller IC/5 REPAIR
TEL UNITY BOARD REPAIR
Motorola MVME 147-023 147-023 S1-PLT0203
TEL TVB6004-1 QMC3 VME BOARD 1208-001184-16
TEL TVB9003-1 316 BOARD 316 3281-000080-11
TEL KE-I PCB PST OPT (350) BOARD 3208-000095-11 FOR TEL P8 WAFER PROBER SYSTEM
TEL PCB PST-STD 3281-000146-13, 3208-000146-11 PCI Card
TEL P-12XL / TVB3102-1/SIO 4CHANNEL VM 3281-000014-17
Tel Tvb3401-1/Gpib 3208-000019-13
TEL FURNACE BOARD REPAIR
TEL MC-31050-M 1181-000428-1D
TEL MC-31050-P 1181-000249-1R
TEL MC-31050-S 1181-000252-1E
TEL MC-31050-T 1181-000451-14
TEL MC-31039GA5 1181-000450-13