SAMJUNG Corporation - Global Semiconductor Parts & Repair Service Provider
Samjung Corporation
SAMJUNG
Samjung Corporation
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BUSINESS AREA

Repair Service

Repair Service

Discover our specialized solutions in repair service.

2030

MFC & BARATRON & mks PRESSURE CONTROLLER

- MFC Repair ( LIST )
- MKS BARATRON REPAIR
- MKS PRESSURE CONTROLLER
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20100

NOVELLUS CERAMIC DOME

-Novellus Ceramic Dome Repair
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20130

AMAT DTCU

AMAT DTCU REPAIR
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20140

VALVE ( VAT & SMC & V-TEX & KITZ & MKS etc )

-MKS VACUUM VALVE Repair
-HORIBA INJECTION VALVE Repair
-SMC VALVE& CYLINDER Repair
-V-TEX, KITZ VALVE Repair
-VAT VALVE Repair
-CKD VALVE Repair
-VALVE CONTROLLER REPAIR
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20150

AMAT MAGNET

AMAT MAGNET REFURBISHIMENT FOR ENDURA
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20160

POWER SUPPLY & GENERATOR & MATCHER

-AMAT ESC POWER SUPPLY
-ION IMPLANTER POWR SUPPLY
-NOVELLUS ESC POWER SUPPLY
-GENERATOR
-MATCHER
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20170

REMOTE PLASMA SOURCE

-RPS(REMOTE PLASMA SOURCE)REPAIR
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20180

OZONE(INUSA & MKS & SUMITOMO )

- MKS OZONE GENERATOR O/H
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20190

AMAT MONOCHROMATOR

AMAT MONOCHROMATOR REPAIR(0010-10556)
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20200

ROTARY JOINT(UNION)

ROTARY JOINT(UNION) Repair
- EBARA
- AMAT
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20210

TEMP CONTROLLER

ESC TEMP CONTROLLER REPAIR
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2010

PUMP ( DRY & TMP & CRYO )

-TURBO PUMP Repair (OVERHAUL ( Repair) & PARTS Supply)
-DRYPUMP OVERHAUL KIT Supply(EBARA, EDWARDS, ALCATEL ETC)
-BEARING　SET Supply for TURBO PUMP Repair
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2040

BOARD(PCB) REPAIR

- AMAT BOARD
- LAM BOARD
- TEL BOARD
- ION IMPLANTER BOARD ETC
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20220

AMAT APPLICATOR TUBE

AMAT APPLICATOR TUBE REPAIR
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20230

MEASURING INSTRUMNETS

- CRYSTAL MONITOR(INFICON)
- OPTICAL MONITOR
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20240

TEL TRACK HOT PLATE & COOL PLATE OH

TEL TRACK HOT PLATE & COOL PLATE OH
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20250

SMC CONTROLLER & ASYST INDEXER

- TEMP CONTROLLER REPAIR
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20260

VARIAN ION IMPLANTER

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20310

ASSY UNIT

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20270

KOKUSAI FURNACE TOOL

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20110

NOVELLUS CONTROLLER

C-2
1 02-152902-00 SYSTEM CONTROLLER
2 02-157591-00 SYSTEM CONTROLLER
3 02-105157-00 SYSTEM CONTROLLER
4 02-127707-00 SYSTEM CONTROLLER
5 02-145682-00 SYSTEM CONTROLLER
6 02-028522-00 SYSTEM CONTROLLER
7 02-113640-00 SYSTEM CONTROLLER
8 02-034310-00 MODULE CONTROLLER
9 02-132030-00 MODULE CONTROLLER
10 02-105005-00 MODULE CONTROLLER
11 02-113639-00 MODULE CONTROLLER
12 02-127708-00 MODULE CONTROLLER
13 02-116798-00 MODULE CONTROLLER

MC1 CHASE CONTROLLER
1 02-136488-00 CHASE CONTROLLER
2 02-279391-00 CHASE CONTROLLER

C-3 MC3 / MC3R CONTROLLER
1 02-321865-00 SYSTEM/MODULE CONTROLLER
2 02-406010-00 SYSTEM/MODULE CONTROLLER
3 02-321899-00 SYSTEM CONTROLLER
4 02-257935-00 SYSTEM CONTROLLER
5 02-257829-00 SYSTEM CONTROLLER
6 02-272554-00 SYSTEM CONTROLLER
7 02-253704-00 MODULE CONTROLLER
8 02-253705-00 MODULE CONTROLLER
9 02-267883-00 MODULE CONTROLLER

MC4 CONTROLLER
1 685-151547-101 SYSTEM/MODULE CONTROLLER
2 02-415129-00 SYSTEM/MODULE CONTROLLER

EC1 CONTROLLER
1 61-344687-00 SYSTEM/MODULE CONTROLLER

EC2 CONTROLLER
1 63-441957-00 SYSTEM/MODULE CONTROLLER
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20120

CHILLER(NESLAB, AFFINITY)

CHILLER REPAIR
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2070

LASER HEAD

-HP 5517 A,B,C
-ZYGO 7701,7702,7712
-ASML GREEN,RED　LASER、HE-NE LASER
-DPSS LASER FOR METROLOGY & INSPECTION FOR KLATENCOR, HITACHI CD-SEM
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2080

CERAMIC HEATER

CERAMIC HEATER REPAIR
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2050

ROBOT

- Brooks Automation Robot
- AMAT HP/VHP ROBOT
- PRI ROBOT
- ZENMARK ROBOT
- AKT ROBOT
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2090

MOTOR & DRIVER

-YASKAWA SERVO MOTOR/DRIVER Repair
-ORIENTAL VEXTA STEPPING MOTOR/DRIVER Repair
-HARMONIC DRIVER ACTUATOR Repair
-SANKYO MOTOR Repair(for LCD)
-DD MOTOR,DC MOTOR,MINI MOTOR Repair
-Panasonic Motor Repair etc.
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2020

ESC

-AMAT CERAMIC ESC Repair Supply
-LAM CERAMIC ESC Repair Service
-LAM AL ESC Supply
-AMAT POLYIMIDE ESC Repair/Brand new Supply
- TEL POLYIMIDE ESCRepair / Brand new Supply
- AMAT CERAMIC HEATER Repair Service
- (MCA HEATER,DXZ HEATER etc)
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Cannot find what you are looking for?

Contact our engineering team for custom solutions and technical inquiries. We are here to help you.

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