BUSINESS AREA
Repair Service
Repair Service
Discover our specialized solutions in repair service.
MFC & BARATRON & mks PRESSURE CONTROLLER
- MFC Repair ( LIST )
- MKS BARATRON REPAIR
- MKS PRESSURE CONTROLLER
- MKS BARATRON REPAIR
- MKS PRESSURE CONTROLLER
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NOVELLUS CERAMIC DOME
-Novellus Ceramic Dome Repair
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AMAT DTCU
AMAT DTCU REPAIR
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VALVE ( VAT & SMC & V-TEX & KITZ & MKS etc )
-MKS VACUUM VALVE Repair
-HORIBA INJECTION VALVE Repair
-SMC VALVE& CYLINDER Repair
-V-TEX, KITZ VALVE Repair
-VAT VALVE Repair
-CKD VALVE Repair
-VALVE CONTROLLER REPAIR
-HORIBA INJECTION VALVE Repair
-SMC VALVE& CYLINDER Repair
-V-TEX, KITZ VALVE Repair
-VAT VALVE Repair
-CKD VALVE Repair
-VALVE CONTROLLER REPAIR
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AMAT MAGNET
AMAT MAGNET REFURBISHIMENT FOR ENDURA
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POWER SUPPLY & GENERATOR & MATCHER
-AMAT ESC POWER SUPPLY
-ION IMPLANTER POWR SUPPLY
-NOVELLUS ESC POWER SUPPLY
-GENERATOR
-MATCHER
-ION IMPLANTER POWR SUPPLY
-NOVELLUS ESC POWER SUPPLY
-GENERATOR
-MATCHER
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REMOTE PLASMA SOURCE
-RPS(REMOTE PLASMA SOURCE)REPAIR
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OZONE(INUSA & MKS & SUMITOMO )
- MKS OZONE GENERATOR O/H
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AMAT MONOCHROMATOR
AMAT MONOCHROMATOR REPAIR(0010-10556)
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ROTARY JOINT(UNION)
ROTARY JOINT(UNION) Repair
- EBARA
- AMAT
- EBARA
- AMAT
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TEMP CONTROLLER
ESC TEMP CONTROLLER REPAIR
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PUMP ( DRY & TMP & CRYO )
-TURBO PUMP Repair (OVERHAUL ( Repair) & PARTS Supply)
-DRYPUMP OVERHAUL KIT Supply(EBARA, EDWARDS, ALCATEL ETC)
-BEARING SET Supply for TURBO PUMP Repair
-DRYPUMP OVERHAUL KIT Supply(EBARA, EDWARDS, ALCATEL ETC)
-BEARING SET Supply for TURBO PUMP Repair
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BOARD(PCB) REPAIR
- AMAT BOARD
- LAM BOARD
- TEL BOARD
- ION IMPLANTER BOARD ETC
- LAM BOARD
- TEL BOARD
- ION IMPLANTER BOARD ETC
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AMAT APPLICATOR TUBE
AMAT APPLICATOR TUBE REPAIR
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MEASURING INSTRUMNETS
- CRYSTAL MONITOR(INFICON)
- OPTICAL MONITOR
- OPTICAL MONITOR
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TEL TRACK HOT PLATE & COOL PLATE OH
TEL TRACK HOT PLATE & COOL PLATE OH
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SMC CONTROLLER & ASYST INDEXER
- TEMP CONTROLLER REPAIR
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VARIAN ION IMPLANTER
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ASSY UNIT
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KOKUSAI FURNACE TOOL
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NOVELLUS CONTROLLER
C-2
1 02-152902-00 SYSTEM CONTROLLER
2 02-157591-00 SYSTEM CONTROLLER
3 02-105157-00 SYSTEM CONTROLLER
4 02-127707-00 SYSTEM CONTROLLER
5 02-145682-00 SYSTEM CONTROLLER
6 02-028522-00 SYSTEM CONTROLLER
7 02-113640-00 SYSTEM CONTROLLER
8 02-034310-00 MODULE CONTROLLER
9 02-132030-00 MODULE CONTROLLER
10 02-105005-00 MODULE CONTROLLER
11 02-113639-00 MODULE CONTROLLER
12 02-127708-00 MODULE CONTROLLER
13 02-116798-00 MODULE CONTROLLER
MC1 CHASE CONTROLLER
1 02-136488-00 CHASE CONTROLLER
2 02-279391-00 CHASE CONTROLLER
C-3 MC3 / MC3R CONTROLLER
1 02-321865-00 SYSTEM/MODULE CONTROLLER
2 02-406010-00 SYSTEM/MODULE CONTROLLER
3 02-321899-00 SYSTEM CONTROLLER
4 02-257935-00 SYSTEM CONTROLLER
5 02-257829-00 SYSTEM CONTROLLER
6 02-272554-00 SYSTEM CONTROLLER
7 02-253704-00 MODULE CONTROLLER
8 02-253705-00 MODULE CONTROLLER
9 02-267883-00 MODULE CONTROLLER
MC4 CONTROLLER
1 685-151547-101 SYSTEM/MODULE CONTROLLER
2 02-415129-00 SYSTEM/MODULE CONTROLLER
EC1 CONTROLLER
1 61-344687-00 SYSTEM/MODULE CONTROLLER
EC2 CONTROLLER
1 63-441957-00 SYSTEM/MODULE CONTROLLER
1 02-152902-00 SYSTEM CONTROLLER
2 02-157591-00 SYSTEM CONTROLLER
3 02-105157-00 SYSTEM CONTROLLER
4 02-127707-00 SYSTEM CONTROLLER
5 02-145682-00 SYSTEM CONTROLLER
6 02-028522-00 SYSTEM CONTROLLER
7 02-113640-00 SYSTEM CONTROLLER
8 02-034310-00 MODULE CONTROLLER
9 02-132030-00 MODULE CONTROLLER
10 02-105005-00 MODULE CONTROLLER
11 02-113639-00 MODULE CONTROLLER
12 02-127708-00 MODULE CONTROLLER
13 02-116798-00 MODULE CONTROLLER
MC1 CHASE CONTROLLER
1 02-136488-00 CHASE CONTROLLER
2 02-279391-00 CHASE CONTROLLER
C-3 MC3 / MC3R CONTROLLER
1 02-321865-00 SYSTEM/MODULE CONTROLLER
2 02-406010-00 SYSTEM/MODULE CONTROLLER
3 02-321899-00 SYSTEM CONTROLLER
4 02-257935-00 SYSTEM CONTROLLER
5 02-257829-00 SYSTEM CONTROLLER
6 02-272554-00 SYSTEM CONTROLLER
7 02-253704-00 MODULE CONTROLLER
8 02-253705-00 MODULE CONTROLLER
9 02-267883-00 MODULE CONTROLLER
MC4 CONTROLLER
1 685-151547-101 SYSTEM/MODULE CONTROLLER
2 02-415129-00 SYSTEM/MODULE CONTROLLER
EC1 CONTROLLER
1 61-344687-00 SYSTEM/MODULE CONTROLLER
EC2 CONTROLLER
1 63-441957-00 SYSTEM/MODULE CONTROLLER
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CHILLER(NESLAB, AFFINITY)
CHILLER REPAIR
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LASER HEAD
-HP 5517 A,B,C
-ZYGO 7701,7702,7712
-ASML GREEN,RED LASER、HE-NE LASER
-DPSS LASER FOR METROLOGY & INSPECTION FOR KLATENCOR, HITACHI CD-SEM
-ZYGO 7701,7702,7712
-ASML GREEN,RED LASER、HE-NE LASER
-DPSS LASER FOR METROLOGY & INSPECTION FOR KLATENCOR, HITACHI CD-SEM
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CERAMIC HEATER
CERAMIC HEATER REPAIR
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ROBOT
- Brooks Automation Robot
- AMAT HP/VHP ROBOT
- PRI ROBOT
- ZENMARK ROBOT
- AKT ROBOT
- AMAT HP/VHP ROBOT
- PRI ROBOT
- ZENMARK ROBOT
- AKT ROBOT
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MOTOR & DRIVER
-YASKAWA SERVO MOTOR/DRIVER Repair
-ORIENTAL VEXTA STEPPING MOTOR/DRIVER Repair
-HARMONIC DRIVER ACTUATOR Repair
-SANKYO MOTOR Repair(for LCD)
-DD MOTOR,DC MOTOR,MINI MOTOR Repair
-Panasonic Motor Repair etc.
-ORIENTAL VEXTA STEPPING MOTOR/DRIVER Repair
-HARMONIC DRIVER ACTUATOR Repair
-SANKYO MOTOR Repair(for LCD)
-DD MOTOR,DC MOTOR,MINI MOTOR Repair
-Panasonic Motor Repair etc.
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ESC
-AMAT CERAMIC ESC Repair Supply
-LAM CERAMIC ESC Repair Service
-LAM AL ESC Supply
-AMAT POLYIMIDE ESC Repair/Brand new Supply
- TEL POLYIMIDE ESCRepair / Brand new Supply
- AMAT CERAMIC HEATER Repair Service
- (MCA HEATER,DXZ HEATER etc)
-LAM CERAMIC ESC Repair Service
-LAM AL ESC Supply
-AMAT POLYIMIDE ESC Repair/Brand new Supply
- TEL POLYIMIDE ESCRepair / Brand new Supply
- AMAT CERAMIC HEATER Repair Service
- (MCA HEATER,DXZ HEATER etc)
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